Semenova, Olga Ivanovna
Head of Laboratory, Ph.D. in ChemistryA.V. Rzhanov Institute of Semiconductor Physics of SB RAS
http://www.isp.nsc.ru/
Russia, 630090, Novosibirsk, Ac. Lavrentiev Ave, 13
Phone: +7(383) 333-27-66, Fax: +7(383) 333-27-71
Reports list
- Yu Y.*, Semenova O.I.**
Strained Silicon in Electronics and Photonics
*Institute of Semiconductors CAS (Pekin), China
**A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia - Semenova O.I.*, Козельская А.И.**, Спесивцев Е.В.***
Механические напряжения в плазмохимическом SiNx:H
*A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia
**Institute of Strength Physics and Materials Science SB RAS (Tomsk), Russia
***United Institute of Semiconductor Physics SB RAS (Novosibirsk), Russia - Kosinova M.*, Ермакова Е.Н.*, Semenova O.I.**
Оптические покрытия на основе фаз системы Si-N-C-H
*Nikolaev Institute of Inorganic Chemistry of SB RAS (Novosibirsk), Russia
**A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia