Vdovin V.I. Fedina L.I. Гутаковский А.К. Shek E. Sobolev N.
Formation of structural defects in Si wafers irradiated with low-energy electron beam
Reporter: Vdovin V.I.
Abstracts file: | Вдовин_Кремний-2014(v2).doc |
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Abstracts file: | Вдовин_Кремний-2014(v2).doc |