Козельская, Анна Ивановна
Institute of Strength Physics and Materials Science SB RAS
http://www.ispms.ru
Russia, 634021, Tomsk, pr. Academicheskii, 2/1
Phone: +7(382-2) 49-18-81, Fax: +7(382-2) 49-25-76
Report
- Semenova O.I.*, Козельская А.И.**, Спесивцев Е.В.***
Механические напряжения в плазмохимическом SiNx:H
*A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia
**Institute of Strength Physics and Materials Science SB RAS (Tomsk), Russia
***United Institute of Semiconductor Physics SB RAS (Novosibirsk), Russia