Файнер, Надежда
Nikolaev Institute of Inorganic Chemistry of SB RAS
http://www.che.nsk.su
Russia, 630090, Novosibirsk, Acad. Lavrentieva ave., 3
Phone: +7(383) 330-94-90, Fax: +7(383) 330-94-89
Report
- Румянцев Ю.*, Плеханов А.*, Файнер Н.*, Максимовский е.*, Шаяпов В.*, Юшина И.*
Hydrogenated silicon oxycarbonitride films - promising materials for opto - and nanoelectronics
*Nikolaev Institute of Inorganic Chemistry of SB RAS (Novosibirsk), Russia