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Козельская, Анна Ивановна
Institute of Strength Physics and Materials Science SB RAS
http://www.ispms.ru
Russia, 634021, Tomsk, pr. Academicheskii, 2/1
Phone: +7(382-2) 49-18-81, Fax: +7(382-2) 49-25-76
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Semenova O.I.
*
,
Козельская А.И.
**
,
Спесивцев Е.В.
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Механические напряжения в плазмохимическом SiNx:H
*
A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia
**
Institute of Strength Physics and Materials Science SB RAS (Tomsk), Russia
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United Institute of Semiconductor Physics SB RAS (Novosibirsk), Russia
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